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Piezoelectric micromachined ultrasonic transducer

MEMS-based piezoelectric ultrasonic transducers

MEMS-based piezoelectric ultrasonic transducers

Piezoelectric micromachined ultrasonic transducers (PMUT) are MEMS-based piezoelectric ultrasonic transducers. Unlike bulk piezoelectric transducers which use the thickness-mode motion of a plate of piezoelectric ceramic such as PZT or single-crystal PMN-PT, PMUT are based on the flexural motion of a thin membrane coupled with a thin piezoelectric film, such as PVDF.

In comparison with bulk piezoelectric ultrasound transducers, PMUT can offer advantages such as increased bandwidth, flexible geometries, natural acoustic impedance match with water, reduced voltage requirements, mixing of different resonant frequencies and potential for integration with supporting electronic circuits especially for miniaturized high frequency applications.

References

References

  1. Trolier-McKinstry, Susan. (January 2004). "Thin Film Piezoelectric for MEMS". Journal of Electroceramics.
  2. Hajati, Arman. (2012). "Three-dimensional micro electromechanical system piezoelectric ultrasound transducer". Applied Physics Letters.
  3. Muralt, Paul. (December 2005). "Piezoelectric micromachined ultrasonic transducers based on PZT thin films". IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.
  4. Qiu, Yongqiang. (2015). "Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging". Sensors.
  5. Brown, Lewis. (November 2000). "Design Considerations for Piezoelectric Polymer Ultrasound Transducer". IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.
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