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Octafluorocyclobutane

9.97 kg/m3 at −6 °C and 1 atm (gas)

8.82 kg/m3 15 °C and 1 atm (gas)

Octafluorocyclobutane, or perfluorocyclobutane, C4F8, is an organofluorine compound which enjoys several niche applications. Octafluorocyclobutane is a colourless gas and shipped as a liquefied gas. It is the perfluorinated analogue of cyclobutane whereby all C–H bonds are replaced with C–F bonds.

Production

Octafluorocyclobutane is produced by the dimerization of tetrafluoroethylene and the reductive coupling of 1,2-dichloro-1,1,2,2-tetrafluoroethane.

Properties

The critical point of octafluorocyclobutane is at 115.3 °C and 2.79 MPa.

Applications

In the production of semiconductor materials and devices, octafluorocyclobutane serves mainly as a passivation layer material in etching processes. Sometimes it is used as an etchant. It has also been investigated as a refrigerant in specialised applications, as a replacement for ozone depleting chlorofluorocarbon refrigerants. Exploiting its volatility and chemical inertness, octafluorocyclobutane may be found in some aerosolized foods. It is listed by the Codex Alimentarius under number 946 (E946 for EU). It is investigated as a possible replacement for sulfur hexafluoride as a dielectric gas.

References

References

  1. (2002). "Fluorine Compounds, Organic".
  2. "Octafluorocyclobutane (RC318)". Air Liquide.
  3. (2014). "Fluorocarbon assisted atomic layer etching of SiO2 using cyclic Ar/C4F8 plasma". Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films.
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fluorocarbons aerosol-propellants refrigerants dielectric-gases cyclobutanes
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